Nowadays. cluster tools tend to concurrently process multiple types of wafers with similar recipes in order to improve their utilization and flexibility in semiconductor manufacturing. Different wafer types may have different wafer flow patterns. resulting in that cluster tools are deadlock-prone. https://www.ngetikin.com/flash-choice-1-Gallon-Roll-Cote-High-Performance-Moisture-Vapor-Barrier-Coating-and-Primer-limited-super/